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MNE
Produces vital parts of semiconductor equipments

NANOPURE FKM O-RINGS

NANOPURE® 9023SP

A high fluorine fluoroelastomer with enhanced chemical resistance

NANOPURE 9023SP为了能用于半导体及Display产业严苛的工程上,以高氟含量的高性能素材进行了开发。

NANOPURE 9023SP是在高反应性气体及严苛的等离子环境下,以低的蚀刻率,
为了将因产生粒子而造成的问题最小化设计而成。

另外,以优秀的永久压缩复原率与优秀的机械特性,延长SEAL的寿命,提供高的工程收益率。
NANOPURE 9023SP提供的卓越的纯度、耐等离子性及耐化学性,可提供费用方面的好处,并具备最好的性能。

NANOPURE® 9023SP
Features & Benefit
  • Outstanding chemical resistance to a wide range of media
  • Low compression set properties
  • High sealing efficiency
  • Cost effective high performance fluoroelastomer
Suggested Applications
  • Slit Valve seals
  • Static & Dynamic seals
  • Check Valves
  • Pumps & Valves
Typical Physical Properties
Typical Physical Properties
Polymer Type Tetrapolymer(HPE)
Hardness1), Shore A 73
Tensile Strength at Break2), MPa 22.5
Elongation at Break3), % 226
100% Modulus4), MPa 4.7
Compression Set5), %
70 hours @ 204℃
17.9
Maximum Continuous Service,
Temperature, ℃
250
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)
NANOPURE ® EAO75S

For Minimal Contamination in Semiconductor / LCD Processes

NANOPURE EAO75S是大幅提高传统FKM的耐磨性与耐化学性的产品。

NANOPURE EAO75S因特别优秀的耐磨性,将因机械性损害造成的问题最小化,
延长SEAL的寿命,提供高的工程收益率。
另外,是具备优秀的永久压缩复原率与在低等离子环境下拥有优秀抵抗力的产品。

NANOPURE EAO75S可在最大260度下进行使用。

NANOPURE ® EAO75S
Features & Benefit
  • Excellent abrasion resistance
  • Minimal contamination due to seal degradation or metallic ion content
  • Extends in-use seal life between preventive maintenance cycles
  • Excellent physical properties
  • Low compression set
Suggested Applications
  • Endpoint windows
  • Lid seals
  • Valve seals
  • Gas inlet seals
  • Fitting seals
  • Slit valve seals
  • Windows seals
  • Chamber seals
Abrasion Test Result
  • NANOPURE® EAO75S

  • FKM A

  • FKM B

Surface after Abrasion Test (Microscope x 50)

Typical Physical Properties
Typical Physical Properties
Color Black
Polymer Type Fluoroelastomer
Hardness1), Shore A 74
Tensile Strength at Break2), MPa 21.6
Elongation at Break3), % 230
100% Modulus4), MPa 5.4
Compression Set5), %
70 hours @ 204℃
16
Maximum Continuous Service,
Temperature, ℃
260
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)