엠앤이

버튼

bg

엠엔이

닫기

MNE
Produces vital parts of semiconductor equipments

NANOPURE FFKM O-RINGS

NANOPURE ® HX-7

Outstanding Plasma Resistance for Corrosive Environments

NANOPURE HX-7是为了用于半导体及Display产业严苛的工程中,以高性能素材进行开发的灰色全氟弹性体。

NANOPURE HX-7是在因等离子的高腐蚀性环境下,以低的蚀刻率,为了将因发生粒子造成的问题最小化设计而成。
另外,通过优秀的热特性与永久压缩复原率,延长SEAL的寿命,提供高的工程收益率。

NANOPURE HX-7可在最大325度下进行使用。

NANOPURE® 9023SP
Features & Benefit
  • Outstanding plasma resistance in highly corrosive environments
  • Excellent thermal stability
  • Excellent (low) compression set properties
  • Excellent seal force retention properties
Suggested Applications
  • Chamber seals
  • Quartz tube seals
  • Center ring seals
  • Plenum seals
  • Fittings
Plasma Resistance Test Result

< Conditions >

  • - Gas flow : 150 sccm
  • - Pressure : NF3 150mT, O2 380mT
  • - RF Power : 1,100W
  • - Run time : 30 min.
  • - Temperature : 200℃
Typical Physical Properties
Typical Physical Properties
Color Gray
Polymer Type FFKM
Hardness1), Shore A 75
Tensile Strength at Break2), MPa 11.2
Elongation at Break3), % 202
100% Modulus4), MPa 6.1
Compression Set5), % 70 hours @ 204℃ 12
Compression Set5), % 70 hours @ 300℃ 34
Compression Set5), % 70 hours @ 325℃ 52
Maximum Continuous Service,
Temperature, ℃
325
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)