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MNE
Produces vital parts of semiconductor equipments

NANOPURE FFKM O-RINGS

NANOPURE ® HX-8

For Semiconductor CVD Applications

NANOPURE® HX-8是使用高性能材料开发出来的可以应用到半导体和显示屏产业的苛刻
工艺中的纯全氟醚橡胶。

NANOPURE® HX-8即便在因等离子造成的腐蚀强度高的环境中也具有较低的蚀刻率,
可以最大程度减少因产生的粒子(particle)所出现的问题。

另外,还具有优秀的热学特性和物理强度,在静态和动态工艺中均可适用。
NANOPURE® HX-8最高可在310℃的高温条件下使用。

NANOPURE® 9023SP
Features & Benefit
  • Low erosion rate and particle generation in oxygen and fluorine plasmas
  • Excellent thermal stability
  • Very low metals content
  • Excellent mechanical strength
Suggested Applications
  • Gas inlet seals
  • Chamber lid seals
  • Slit valve door seals
  • Bonded gate valves
Plasma Resistance Test Result

< Conditions >

  • - Gas flow : 150 sccm
  • - Pressure : NF3 150mT, O2 380mT
  • - RF Power : 1,100W
  • - Run time : 30 min.
  • - Temperature : 200℃
Typical Physical Properties
Typical Physical Properties
Color Dark
Auburn
Polymer Type Perfluoro
elastomer
Hardness1), Shore A 74
Tensile Strength at Break2), MPa 11.0
Elongation at Break3), % 250/td>
100% Modulus4), MPa 3.9
Compression Set5), % 70 hours @ 204℃ 16
Compression Set5), % 70 hours @ 250℃ 20
Compression Set5), % 70 hours @ 300℃ 39
Compression Set5), % 70 hours @ 310℃ 43
Maximum Continuous Service,
Temperature, ℃
310
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)