Produces vital parts of semiconductor equipments

What is Nano Pure Perfluoroelastomer?

FFKM – Perfluoro Carbon Rubber
  • 1) ASTM Abbreviation – FFKM
  • 2) Chemical structure
    OCF3 (CF₂-CF₂)m Tetrafluoroethylene(TFE), (CF-CF)n Perfluoromethylvinyl-ether(PFMVE), X-(CF₂-CF)p-X Cure Site Monomer(CSM)
  • 3) Basic monomer necessary in synthesis of perfluoro-rubber
    Perfluoroelastomer (FFKM) is
    made with perfluorocarbon rubber, which is a terpolymerization of small quantity of perfluoro-monomer, with bridging point between tetrafluoroethlene (TFE) and perfluoromethyl vinyl ether (PMVE), chemically. Vulcanized rubber produced as the result has no hydrogen atom in its molecule. Due to the absence of hydrogen atom, thermal resistance and chemical resistance increases rapidly in comparison to FKM rubber. In general term, resistant elasticity and sealing power of rubber is combined with the thermal and chemical resistance of the Poly Tetra Fluoro Ethylene (PTFE) resin.
    Tetrafluoroethylene(TFE), Perfluoromethylvinyl-ether(PFMVE), TFE, PFMVE, Cure site monomer, ( Molecular Structure of Perfluoroelastomer )
FFKM – Perfluoro Carbon Rubber
  • 1) Higher Temperature Resistance
    Higher Temperature Resistance
    C-H C-F C- Cl
    Bond Energy (Kcal) 99 116 81
  • 2) Improved Chemical Resistanc
    Covalent Radius (A)
    C-H C-F C- Cl
    Covalent Radius (A) 0.37 0.72 0.99
  • 3) Perfluoro Description

    FFKM is a hyperthermal compound with greater quantity of fluorine contained to further increase resistance against high temperature and chemicals. As such, it can withstand for longer time under environment with existence of oxygen-plasma. Some ratings have maximum of 324oC of continuous temperature. In general, it is used in manufacturing O-ring and gasket used to confront a diverse range of temperatures and come in contact with hydrogen carbon or liquid with high corrosiveness.

    There are FFKM that reaches temperatures in the range of 340 oC. In the case of application to vacuum, customized discharge at very low temperature range [200~300 oC] for prolonged period of processing and very low pollution requirements (emission of gas and discharge of particles) are needed. Following manufacturing, it reaches the gas emission performances that are similar to those of TEFLON and vacuum penetration rate similar to that of VITON compound. FFKM can reach the UHV pressure very well even without the use of metal sealing.