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MNE
Produces vital parts of semiconductor equipments

NANOPURE FKM O-RINGS

NANOPURE® 9023SP

A high fluorine fluoroelastomer with enhanced chemical resistance

NANOPURE® 9023SP has been developed as a high-performance material with a high fluorine content for
the use in harsh processes of semiconductor and display industries.

NANOPURE® 9023SP has been designed to minimize problems due to particle generation by low etching rates in
highly reactive gas and harsh plasma environments. It also provides high process yields by extending the life
of seals with excellent permanent compression recovery rates and excellent mechanical characteristics.

The outstanding purity, plasma resistance and chemical resistance provided by NANOPURE® 9023SP.
give the best performance while providing cost advantages.

NANOPURE® 9023SP
Features & Benefit
  • Outstanding chemical resistance to a wide range of media
  • Low compression set properties
  • High sealing efficiency
  • Cost effective high performance fluoroelastomer
Suggested Applications
  • Slit Valve seals
  • Static & Dynamic seals
  • Check Valves
  • Pumps & Valves
Typical Physical Properties
Typical Physical Properties
Polymer Type Tetrapolymer(HPE)
Hardness1), Shore A 73
Tensile Strength at Break2), MPa 22.5
Elongation at Break3), % 226
100% Modulus4), MPa 4.7
Compression Set5), %
70 hours @ 204℃
17.9
Maximum Continuous Service,
Temperature, ℃
250
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)
NANOPURE ® EAO75S

For Minimal Contamination in Semiconductor / LCD Processes

NANOPURE ® EAO-75S is a product with sharply improved wear resistance and
chemical resistance compared with the existing FKM.

NANOPURE ® EAO-75S provides a high process yield by extending the life of seals through
minimization of mechanical damage problems due to its particularly outstanding wear resistance.
It is also a product having excellent permanent compression rates along with excellent resistance
in low plasma environments.

NANOPURE ® EAO-75S is usable at temperatures up to a maximum of 260℃.

NANOPURE ® EAO75S
Features & Benefit
  • Excellent abrasion resistance
  • Minimal contamination due to seal degradation or metallic ion content
  • Extends in-use seal life between preventive maintenance cycles
  • Excellent physical properties
  • Low compression set
Suggested Applications
  • Endpoint windows
  • Lid seals
  • Valve seals
  • Gas inlet seals
  • Fitting seals
  • Slit valve seals
  • Windows seals
  • Chamber seals
Abrasion Test Result
  • NANOPURE® EAO75S

  • FKM A

  • FKM B

Surface after Abrasion Test (Microscope x 50)

Typical Physical Properties
Typical Physical Properties
Color Black
Polymer Type Fluoroelastomer
Hardness1), Shore A 74
Tensile Strength at Break2), MPa 21.6
Elongation at Break3), % 230
100% Modulus4), MPa 5.4
Compression Set5), %
70 hours @ 204℃
16
Maximum Continuous Service,
Temperature, ℃
260
  • 1) ASTM D1415 (ISO 48)
  • 2) ASTM D412 (ISO 37)
  • 3) ASTM D412 (ISO 37)
  • 4) ASTM D412 (ISO 37)
  • 5) ASTM D395 Method B ; (ISO 815)