MNE

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MNE
Produces vital parts of semiconductor equipments

NANOPURE BLADES

Valve Blade & Load Lock
  • There are numerous processes in the semiconductor process, and wafers are transported through an inner door of the chambers where the processes are conducted.
    After the wafers are transported, the material of a valve blade compound is determined according to the chamber environment of each process.
  • Valve blades are divided into two types; bonded slit valve (bsv) type and vat (company name) type. There are various kinds of valves depending on the manufacturer.
    We manufacture approximately20 kinds of valve blades.
  • BSV type(Rocker V/V Blade)

  • VAT type(12” Large VAT, 300mm Load Lock)