It is a product attached to the HEAD of CMP process and plays the role of stabilizing the HEAD against the shaking of grinding pad
and wafer during the operation of RETAINER RING and POLISHING process.
It performs the role of SEAL and operation simultaneously, and it is the product manufactured in the largest quantity as
a unit product with single material by our company.
Rolling Seal Cross-section
Rolling Seal Area of attachment
What is Wafer seal?
The wafer seal is mounted on the NOVELLUS EP equipment used to electrochemically
The wafer seal is used to prevent any liquid from entering the edge contact areas that
may occur when the wafer is spinning in the electroplating solution (CUSO4).