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MNE
Produces vital parts of semiconductor equipments

NANOPURE CMP

Rolling Seal
  • It is a product attached to the HEAD of CMP process and plays the role of stabilizing the HEAD against the shaking of grinding pad
    and wafer during the operation of RETAINER RING and POLISHING process.
  • It performs the role of SEAL and operation simultaneously, and it is the product manufactured in the largest quantity as
    a unit product with single material by our company.
  • Rolling Seal Cross-section

  • Rolling Seal Area of attachment

What is Wafer seal?
  • The wafer seal is mounted on the NOVELLUS EP equipment used to electrochemically
    process wafers.
  • The wafer seal is used to prevent any liquid from entering the edge contact areas that
    may occur when the wafer is spinning in the electroplating solution (CUSO4).
  • Wafer Seal

  • Wafer Seal Enlarge