Outstanding Plasma Resistance for Corrosive Environments
NANOPURE® HX-7 is a grey-colored perfluoroelastomer developed as a high-performance material for
the use in harsh processes of semiconductor and display industries.
NANOPURE® HX-7 has been designed to minimize problems due to particle generation by low etching rates in
a highly corrosive environment caused by plasma.
It also provides high process yields by extending the life of seals with excellent thermal characteristics
and permanent compression recovery rates.
NANOPURE® HX-7 is usable at temperatures up to a maximum of 325℃.
< Conditions >
|Hardness1), Shore A||75|
|Tensile Strength at Break2), MPa||11.2|
|Elongation at Break3), %||202|
|100% Modulus4), MPa||6.1|
|Compression Set5), % 70 hours @ 204℃||12|
|Compression Set5), % 70 hours @ 300℃||34|
|Compression Set5), % 70 hours @ 325℃||52|
|Maximum Continuous Service,