For Semiconductor CVD Applications
NANO PURE HX-8 is a pure perfluoroelastomer developed as a high-performance material
developed for use in harsh processes of semiconductor and display industry.
NANOPURE HX-8 has been designed to minimize the problems caused by occurrence of
particles with a low etch rate in highly corrosive environments due to plasma. It is also .
suitable for both static and dynamic processes by providing excellent thermal
characteristics and physical strengths.
NANOPURE HX-8 can be used at temperatures up to a maximum of 310 degrees.
< Conditions >
|Hardness1), Shore A||74|
|Tensile Strength at Break2), MPa||11.0|
|Elongation at Break3), %||250|
|100% Modulus4), MPa||3.9|
|Compression Set5), % 70 hours @ 204℃||16|
|Compression Set5), % 70 hours @ 250℃||20|
|Compression Set5), % 70 hours @ 300℃||39|
|Compression Set5), % 70 hours @ 310℃||43|
|Maximum Continuous Service,