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FFKM & FKM

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Physical Properties

FFKM是指全氟化弹性体，比普通氟橡胶含有更多的氟。
FFKM对温度较高、各种化学物质具有抗性，即使在等离子体存在的环境中也能耐受很长时间。特别是特定等级的过氟橡胶最多可在327℃下连续使用,基于这些特点,在半导体、石油化学等需要Sealing的多种产业中得到应用。

01 Molecular Structure

分子结构

FFKM & FKM Physical Properties

02 MNE Products

MNE
Products

03Applications

应用领域

Automotive

Semiconductor

Oil & Gas

Chemical Processing
Industry

详细比较

Contents	工序	Seal 温度	DuPont^TM / Kalrez®	GreeneTweed^TM / Chemraz®	MNE^TM NANOPURE®
Plasma Processes	HDP-CVD / PE-CVD	25 ~ 200℃	9100 / 8085	XRZ 657	HX-8 XUP M208
	Etching	25 ~ 200℃			HX-8 XUP M208
	Ashing / Stripping	25 ~ 250℃			HP9600 XUP HX-10
Thermal Processes	SA - CVD	25 ~ 250℃	8085	XE38	I800W HP9600
	Metal-CVD, ALD, LP-CVD	25 ~ 300℃	8900 / 9100	657	HX-5 HX-8
	Oxidation, Diffusion	150 ~ 300℃	9800 / 8475	657	HX-5 875HT
	Lamp Anneal, RTP	150 ~ 300℃	8475	E38	I800W
Wet Processes	Wafer Prep	25 ~ 125℃	6375 4079		I800W 4080
	Etching	25~180℃
	Photolithography	25~125℃
	Stripping	25~125℃	6375
	Copper Plationg	25~100℃	6375

Contents		Service Temp.,℃	Hardness, Shore A	Tensile Stength, MPa	Elongation, %	100% Modulus, MPa	C/S 204℃ at 70hr (177℃ at 22hr), %
Non Filler	HX-10	275	69	19.5	184	3.1	16
	HX-8	310	74	11.0	250	3.9	16
	XUP	300	75	14.0	216	4.2	12
	M208	310	71	11.9	208	4.5	15
With Filler	HX-9	327	78	14.3	178	7.2	10
	HX-7	325	75	11.2	202	6.1	12
	875HT	320	75	10.0	220	4.2	12
	4080	280	78	17.7	140	11.4	20
Copolymer	7575	220	75	15.1	210	5.3	28
Copolymer	7870G	220	75	14.0	220	6.2	28
Terpolymer	EAO75S	260	74	21.6	230	5.4	16
Terpolymer	9020SP	260	70	18.2	290	2.1	20
HPE (Tetrapolymer)	9023SP	250	73	22.5	226	4.7	17.9
	UTC-3	250	68	20.0	280	2.6	20
	UTC-4	220	68	17.1	323	2.2	23
PVMQ	102FVMQ	200	70	10.0	300	4.0	15

FFKM – non Filler
FFKM – with Filler
FKM – Copolymer
FKM – Terpolymer
HPE – Tetrapolymer
FVMQ

NANOPURE® HX-10

For Semiconductor Ash/Strip Application

NANOPURE®HX-10是为了Ash/Strip工序的透明产品。

NANOPURE®HX-10是一种超纯全氟碳化物产品，无填充物设计，最大程度地降低了工艺污染的风险，在氧氟基等离子体环境中表现出良好的等离子体抗裂性能。此外，机械强度好，永久压缩复原率低。 NANOPURE®HX-10最高可在275℃下使用。

Features & Benefit

Exceptional plasma resistance in oxygen and fluorine environments
High purity, very low metallic ion content
Excellent compression set properties
Excellent resistance to dry process chemistry

Suggested Applications

Gas inlet / outlet seals
Endpoint windows
Other static and low stress / low sealing force application

Typical Physical Properties

Color	Transparent Amber
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	69
Tensile Strength at Break²⁾, Mpa	19.5
Elongation at Break³⁾, %	184
100% Modulus⁴⁾, Mpa	3.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
Maximum Application Temperature, ℃	275

1) ASTM D1415 (ISO 48), 2) ASTM D412 (ISO 37), 3) ASTM D412 (ISO 37), 4) ASTM D412 (ISO 37), 5) ASTM D395 Method B : (ISO 815)

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	74
Tensile Strength at Break²⁾, Mpa	11.0
Elongation at Break³⁾, %	250
100% Modulus⁴⁾, Mpa	3.9
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
70 hours @ 250℃	20
70 hours @ 300℃	39
70 hours @ 310℃	43
Maximum Application Temperature, ℃	310

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	14.0
Elongation at Break³⁾, %	216
100% Modulus⁴⁾, Mpa	4.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	38
Maximum Application Temperature, ℃	300

Color	Dark Auburn
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	71
Tensile Strength at Break²⁾, Mpa	11.9
Elongation at Break³⁾, %	208
100% Modulus⁴⁾, Mpa	4.5
Compression Set⁵⁾, %	-
70 hours @ 204℃	15
70 hours @ 250℃	19
70 hours @ 300℃	41
70 hours @ 310℃	44
Maximum Application Temperature, ℃	310

Color	Black
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	78
Tensile Strength at Break²⁾, Mpa	14.3
Elongation at Break³⁾, %	178
100% Modulus⁴⁾, Mpa	7.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	10
70 hours @ 250℃	14
70 hours @ 300℃	18
70 hours @ 325℃	32
Maximum Application Temperature, ℃	327

Color	Gray
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	11.2
Elongation at Break³⁾, %	202
100% Modulus⁴⁾, Mpa	6.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	34
70 hours @ 310℃	52
Maximum Application Temperature, ℃	325

Color	Beige
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	10.0
Elongation at Break³⁾, %	220
100% Modulus⁴⁾, Mpa	4.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	12
70 hours @ 300℃	38.9
Maximum Application Temperature, ℃	320

Color	White
Polymer Type	Perfluoroelastomer
Hardness¹⁾, Shore A	78
Tensile Strength at Break²⁾, Mpa	17.7
Elongation at Break³⁾, %	140
100% Modulus⁴⁾, Mpa	11.4
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
70 hours @ 300℃	32
Maximum Application Temperature, ℃	280

Color	Black
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	15.1
Elongation at Break³⁾, %	210
100% Modulus⁴⁾, Mpa	5.3
Compression Set⁵⁾, %	-
70 hours @ 204℃	28
Maximum Continuous Service, Temperature, ℃	220

Color	Green
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	75
Tensile Strength at Break²⁾, Mpa	14.0
Elongation at Break³⁾, %	220
100% Modulus⁴⁾, Mpa	6.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	28
Maximum Continuous Service, Temperature, ℃	220

Color	Black
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	74
Tensile Strength at Break²⁾, Mpa	21.6
Elongation at Break³⁾, %	230
100% Modulus⁴⁾, Mpa	5.4
Compression Set⁵⁾, %	-
70 hours @ 204℃	16
Maximum Continuous Service, Temperature, ℃	260

Color	White
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	70
Tensile Strength at Break²⁾, Mpa	18.2
Elongation at Break³⁾, %	290
100% Modulus⁴⁾, Mpa	2.1
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
Maximum Continuous Service, Temperature, ℃	260

Color	Light Gray
Polymer Type	Tetrapolymer(HPE)
Hardness¹⁾, Shore A	73
Tensile Strength at Break²⁾, Mpa	22.5
Elongation at Break³⁾, %	226
100% Modulus⁴⁾, Mpa	4.7
Compression Set⁵⁾, %	-
70 hours @ 204℃	17.9
Maximum Continuous Service, Temperature, ℃	250

Color	Translucent Brown
Polymer Type	High performance elastomer
Hardness¹⁾, Shore A	68
Tensile Strength at Break²⁾, Mpa	20.0
Elongation at Break³⁾, %	280
100% Modulus⁴⁾, Mpa	2.6
Compression Set⁵⁾, %	-
70 hours @ 204℃	20
70 hours @ 250℃	37
Maximum Continuous Service, Temperature, ℃	250

Color	Translucent Brown
Polymer Type	Fluoroelastomer
Hardness¹⁾, Shore A	68
Tensile Strength at Break²⁾, Mpa	17.1
Elongation at Break³⁾, %	323
100% Modulus⁴⁾, Mpa	2.2
Compression Set⁵⁾, %	-
70 hours @ 204℃	23
Maximum Continuous Service, Temperature, ℃	220

Color	Sky Blue
Polymer Type	FVMQ
Hardness¹⁾, Shore A	70
Tensile Strength at Break²⁾, Mpa	10.0
Elongation at Break³⁾, %	300
100% Modulus⁴⁾, Mpa	4.0
Compression Set⁵⁾, %	-
22 hours @ 177℃	15
Service Temperature, ℃	- 60 ~ 200

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